Introducing the KxS semiconductor monitor
DCM-10, a cutting-edge optical refractometer designed for real-time monitoring of wet chemicals in almost all processing steps that involve wafer processing with liquid chemicals or mixtures. The DCM-10 is renowned for its high accuracy and reliability, making it an essential concentration monitoring tool for incoming chemical check, wafer cleaning, chemical etching and chemical mechanical planarization (CMP).
The DCM-10 operates with a 24 VDC input power supply and offers flexible communication options, including analog (4-20 mA) and digital (Modbus TCP). When using the analog signal, the digital port serves as a service port for configuration and diagnostics via a computer web browser, external display, or mobile device. All port options can be utilized simultaneously, providing seamless integration and monitoring capabilities.
Factory calibrated for refractive index measurements, the DCM-10 displays temperature-compensated concentration units in % by weight or g/cm³. This ensures accurate and consistent monitoring of chemical concentrations, critical for maintaining process integrity and quality.
- True standalone operation: All measurement functions contained within the sensor, eliminating the need for an external transmitter.
- Extra small footprint design: The compact sensor and flow are ideal and fit into fab tools and benches.
- Excellent flow properties: True full bore; Optimized laminar flow pattern with minimal shear force on liquid (Patent pending).
- Easy installation: Connects with process line sizes of ¼, ⅜, ½, ¾, and 1 inch, using standard fittings.
- Dual-body construction: Optical components remain intact even if the flow cell is removed, ensuring consistent performance.
- Material compatibility: Materials designed to withstand the demanding conditions of semiconductor processing in the facilities and cleanroom environments.
